diff --git a/Documentation/pregenerated/MitkExtQtHelpCollection.qhc b/Documentation/pregenerated/MitkExtQtHelpCollection.qhc
new file mode 100644
index 0000000000..db05737dc1
Binary files /dev/null and b/Documentation/pregenerated/MitkExtQtHelpCollection.qhc differ
diff --git a/Modules/CppMicroServices/doc/CMakeLists.txt b/Modules/CppMicroServices/doc/CMakeLists.txt
index 3e0e7613c5..c152886b07 100644
--- a/Modules/CppMicroServices/doc/CMakeLists.txt
+++ b/Modules/CppMicroServices/doc/CMakeLists.txt
@@ -1,78 +1,78 @@
 if(NOT US_IS_EMBEDDED AND NOT US_NO_DOCUMENTATION)
   find_package(Doxygen)
 
   if(DOXYGEN_FOUND)
 
     option(US_DOCUMENTATION_FOR_WEBPAGE "Build Doxygen documentation for the webpage" OFF)
     set(US_DOXYGEN_OUTPUT_DIR ${CMAKE_CURRENT_BINARY_DIR} CACHE PATH "Doxygen output directory")
     mark_as_advanced(US_DOCUMENTATION_FOR_WEBPAGE US_DOXYGEN_OUTPUT_DIR)
 
     set(US_HAVE_DOT "NO")
     if(DOXYGEN_DOT_EXECUTABLE)
       set(US_HAVE_DOT "YES")
     endif()
 
     if(NOT DEFINED US_DOXYGEN_DOT_NUM_THREADS)
       set(US_DOXYGEN_DOT_NUM_THREADS 4)
     endif()
 
     # We are in standalone mode, so we generate a "mainpage"
     set(US_DOXYGEN_MAIN_PAGE_CMD "\\mainpage")
     set(US_DOXYGEN_ENABLED_SECTIONS "us_standalone")
 
     if(US_DOCUMENTATION_FOR_WEBPAGE)
       configure_file(doxygen/header.html
-                     ${CMAKE_CURRENT_BINARY_DIR}/header.html COPY_ONLY)
+                     ${CMAKE_CURRENT_BINARY_DIR}/header.html COPYONLY)
       set(US_DOXYGEN_HEADER header.html)
 
       configure_file(doxygen/footer.html
-                     ${CMAKE_CURRENT_BINARY_DIR}/footer.html COPY_ONLY)
+                     ${CMAKE_CURRENT_BINARY_DIR}/footer.html COPYONLY)
       set(US_DOXYGEN_FOOTER footer.html)
 
       configure_file(doxygen/doxygen_extra.css
-                     ${CMAKE_CURRENT_BINARY_DIR}/doxygen_extra.css COPY_ONLY)
+                     ${CMAKE_CURRENT_BINARY_DIR}/doxygen_extra.css COPYONLY)
       set(US_DOXYGEN_EXTRA_CSS doxygen_extra.css)
 
       set(US_DOXYGEN_OUTPUT_DIR ${PROJECT_SOURCE_DIR}/gh-pages)
       if(${PROJECT_NAME}_MINOR_VERSION EQUAL 99)
         set(US_DOXYGEN_HTML_OUTPUT "doc_latest")
       else()
         set(US_DOXYGEN_HTML_OUTPUT "doc_${${PROJECT_NAME}_MAJOR_VERSION}_${${PROJECT_NAME}_MINOR_VERSION}")
       endif()
     else()
       set(US_DOXYGEN_HEADER )
       set(US_DOXYGEN_FOOTER )
       set(US_DOXYGEN_CSS )
       set(US_DOXYGEN_HTML_OUTPUT "html")
     endif()
 
     # Compile a command line tool which transforms comments in CMake scripts into
     # Doxygen parseable C code.
     set(CMakeDoxygenFilter_EXECUTABLE "${CMAKE_RUNTIME_OUTPUT_DIRECTORY}/CMakeDoxygenFilter${CMAKE_EXECUTABLE_SUFFIX}")
     try_compile(_result_var
                 "${CMAKE_CURRENT_BINARY_DIR}"
                 "${CMAKE_CURRENT_SOURCE_DIR}/CMakeDoxygenFilter.cpp"
                 OUTPUT_VARIABLE _compile_output
                 COPY_FILE ${CMakeDoxygenFilter_EXECUTABLE}
                )
 
     if(NOT _result_var)
       message(FATAL_ERROR "error: Faild to compile ${CMAKE_CURRENT_SOURCE_DIR}/CMakeDoxygenFilter.cpp (result: ${result_var})\n${_compile_output}")
     endif()
 
     configure_file(doxygen.conf.in
                    ${CMAKE_CURRENT_BINARY_DIR}/doxygen.conf)
 
     add_custom_target(doc
                       ${DOXYGEN} ${CMAKE_CURRENT_BINARY_DIR}/doxygen.conf
                       WORKING_DIRECTORY ${CMAKE_CURRENT_BINARY_DIR}
                       VERBATIM
                       )
 
     install(CODE "execute_process(COMMAND \"${CMAKE_COMMAND}\" --build \"${PROJECT_BINARY_DIR}\" --target doc)")
 
     install(DIRECTORY "${US_DOXYGEN_OUTPUT_DIR}/${US_DOXYGEN_HTML_OUTPUT}"
             DESTINATION "${AUXILIARY_INSTALL_DIR}/doc/"
             COMPONENT doc)
   endif()
 endif()
diff --git a/Modules/ToFHardware/CMakeLists.txt b/Modules/ToFHardware/CMakeLists.txt
index cb7144e627..750314aebf 100644
--- a/Modules/ToFHardware/CMakeLists.txt
+++ b/Modules/ToFHardware/CMakeLists.txt
@@ -1,33 +1,33 @@
 #Define the platform string
 mitkMacroGetPMDPlatformString(_PLATFORM_STRING)
 
 MITK_CREATE_MODULE(
   SUBPROJECTS MITK-ToF
   DEPENDS MitkOpenCVVideoSupport MitkIGTBase MitkLegacyAdaptors MitkCameraCalibration
   PACKAGE_DEPENDS ITK|ITKIONRRD
   ADDITIONAL_LIBS ${ADDITIONAL_LIBS}
 )
 
 # set(tofHardware_srcs )
 # usFunctionEmbedResources(tofHardware_srcs
                          # LIBRARY_NAME mitkToFHardware
                          # ROOT_DIR ${MITK_DATA_DIR}/ToF-Data/CalibrationFiles
                          # FILES  Default_Parameters.xml Kinect_IR_camera.xml Kinect_RGB_camera.xml Mesa-SR4000_Camera.xml PMDCamBoard_camera.xml PMDCamCube2_camera.xml PMDCamCube3_camera.xml
                         # )
 
 add_subdirectory(Testing)
 add_subdirectory(Kinect)
 add_subdirectory(KinectV2)
 add_subdirectory(PMD)
 add_subdirectory(MesaSR4000)
 
 # Install external libraries which are not directly linked to a MITK module
 include(${CMAKE_CURRENT_SOURCE_DIR}/mitkToFHardwareInstallRules.cmake)
 
 CONFIGURE_FILE(${CMAKE_CURRENT_SOURCE_DIR}/mitkToFHardwareInstallRules.cmake
-               ${PROJECT_BINARY_DIR}/mitkToFHardwareInstallRules.cmake @COPYONLY)
+               ${PROJECT_BINARY_DIR}/mitkToFHardwareInstallRules.cmake COPYONLY)
 CONFIGURE_FILE(mitkToFConfig.h.in ${PROJECT_BINARY_DIR}/mitkToFConfig.h @ONLY)
 
 #foreach(tofhardwaresubfolder_dir ${tofhardwaresubfolder_dirs})
 #  add_subdirectory(${tofhardwaresubfolder_dirs})
 #endforeach()