diff --git a/CMakeExternals/Eigen.cmake b/CMakeExternals/Eigen.cmake
index 42066b96fc..6f3ee885b2 100644
--- a/CMakeExternals/Eigen.cmake
+++ b/CMakeExternals/Eigen.cmake
@@ -1,32 +1,30 @@
 #-----------------------------------------------------------------------------
 # Eigen
 #-----------------------------------------------------------------------------
 
 # Sanity checks
 if(DEFINED Eigen_DIR AND NOT EXISTS ${Eigen_DIR})
   message(FATAL_ERROR "Eigen_DIR variable is defined but corresponds to non-existing directory")
 endif()
 
 set(proj Eigen)
 set(proj_DEPENDENCIES )
 set(Eigen_DEPENDS ${proj})
 
 if(NOT DEFINED Eigen_DIR)
 
   ExternalProject_Add(${proj}
-     SOURCE_DIR ${CMAKE_BINARY_DIR}/${proj}-src
-     BINARY_DIR ${proj}-cmake
+     PREFIX ${CMAKE_BINARY_DIR}/${proj}-cmake
      URL ${MITK_THIRDPARTY_DOWNLOAD_PREFIX_URL}/Eigen-3.2.2-headers-only.tar.gz
      URL_MD5 d0a7fe82ab7bd39bf577afebe287aa20
      CMAKE_ARGS
-       -DCMAKE_INSTALL_PREFIX:PATH=${CMAKE_CURRENT_BINARY_DIR}/${proj}-install
-     INSTALL_DIR ${proj}-install
-    )
+       -DCMAKE_INSTALL_PREFIX:PATH=${CMAKE_CURRENT_BINARY_DIR}/${proj}-src
+)
 
-  set(Eigen_DIR ${CMAKE_CURRENT_BINARY_DIR}/${proj}-install)
+  set(Eigen_DIR ${CMAKE_CURRENT_BINARY_DIR}/${proj}-src)
 
 else()
 
   mitkMacroEmptyExternalProject(${proj} "${proj_DEPENDENCIES}")
 
 endif()